![]() EDS can also produce an elemental map, which is an image of an area on a sample that shows the elements present and their concentrations. These x-rays are collected by an EDS detector, sorted and counted and the result can be presented as an EDS spectrum (Fig.1) or histogram. In either a scanning electron microscope ( SEM) or a transmission electron microscope (TEM), the bombardment by the energetic electron beam induces the emission of x-rays at energies which are characteristic of the elements present in the sample. The ability to characterize and identify small particles and other materials in the electron microscope is greatly enhanced by the common addition of energy dispersive X-ray spectrometry (EDS) capability. Energy dispersive X-ray spectrometry (EDS or EDX), sometimes called energy dispersive x-ray analysis (EDXA) is a microanalysis technique used to determine the composition of a sample.ĮDS is considered a non-destructive analytical technique, and it is effective for major and minor element analysis.
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